Memsic: Capacitive Versus Thermal MEMS for High-Vibration Applications

April 27, 2016 // By James Fennelly

In this white paper the author discusses the dangers of mechanically resonant capacitive MEMS sensor structures and points out how his own company's sensors can be built without moving solid parts and use the movement of the hot gas as the measurement mechanism. This can be advantageous for applications in inclinometers and where there can be noisy vibrational environments.