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ASML, Eindhoven University to build 500-person research facility

ASML, Eindhoven University to build 500-person research facility

Technology News |
By Peter Clarke



Lithography equipment maker ASML Holding NV (Veldhoven, The Netherlands) has said it will partner with near neighbour Eindhoven University of Technology to spend “several hundred million euros ” on a research facility at the TU/e campus.

The two parties signed a memorandum of understanding saying they would jointly develop a 10-year strategic research agenda in the fields of plasma physics, artificial intelligence, mechatronics and semiconductor lithography.

The facility, including a cleanroom, is due to arrive “in the coming years” and will be big enough to accommodate around 500 researchers including hundreds from ASML, the company said. Meanwhile the partnership will jointly define a research program that will create 40 PhDs annually. ASML said it will supply engineers as teachers and increase the number of internships it hosts.

ASML said it intends to co-locate research competences at the facility. The cleanroom will include analytical and production equipment in an open-access research laboratory that is also available to TU/e, to other research centers and industrial partners. This would stimulate research into academic research fields of mutual interest such as photonics, quantum computing, nanomaterials and chip manufacturing, said ASML in a statement.

Jos Benschop, corporate vice president of technology at ASML said, “Our relationship with Eindhoven University of Technology goes back to the earliest days of ASML. Our collaboration is based on a shared commitment to create meaningful innovation for society by bridging fundamental science and industrial engineering.”

Related links and articles:

www.asml.com

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