ASML fire hits EUV lithography production
The fire at ASML Berlin occurred in a part of one production building on the site and the smoke partly impacted an adjacent building, and production has restarted in parts of these buildings. The other buildings on the site have not been affected and are fully operational.
However, the fire affected part of the production area of the wafer clamp, a module in the EUV systems. “We are still in the process of completing the recovery plan for this production area and determining how to minimize any potential impact for our EUV customers, both in our output plan and in our field service,” said the company on Friday. ASML is the only supplier of EUV lithography equipment that is essential for silicon chip making at 5nm and below. This is likely to have an impact on the capacity plans for chip makers at the leading edge such as TSMC, Samsung and Intel.
The manufacturing of components for deep UV (DUV) lithography systems for other process nodes has been restarted. “Although there was some disruption regarding components for DUV, we expect to remediate this in such a way that it will not affect our output and revenue plan for DUV,” said ASML.
The Metrology and Inspection products are not affected as they do not contain any components made in Berlin.
The company presents its Q4 and full-year 2021 results in two weeks and expects to provide a further update on the incident then.
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