ASML has started shipping second high-NA EUV litho machine

ASML has started shipping second high-NA EUV litho machine

News |
By Peter Clarke

ASML Holding NV (Veldhoven, The Netherlands) has started shipping its second commercial high numerical aperture extreme ultraviolet lithography scanner to an unnamed customer.

ASML leaves it up to customers to make specific announcements so the question is: who is the recipient?

Christophe Fouquet, who takes over as CEO of ASML on Wednesday April 24, said: “Regarding high NA or 0.55 NA EUV, we shipped our first system to a customer and this system is currently under installation. We started to ship the second system this month and its installation is also about to start.”

The first customer is known to be Intel. Intel has been aggressive in its adoption of high-NA as it attempts to catch up with semiconductor foundry market leaders TSMC and Samsung. Engineers from Intel and ASML have just completed the initial construction of the first high-NA EUVL scanner at Intel’s D1X R&D wafer fab in Hillsboro, Oregon (see Intel Fellow discusses high-NA EUV lithography progress).

The customer for the second high-NA machine is expected to be a logic foundry – rather than a memory manufacturer. Logic, which is now at 3nm and looking to 2nm is ahead of memory in adopting EUV lithography. However, technology-leader TSMC has yet to embrace high-NA EUV and would appears to believe the more cost-effective option is to use conventional EUV machines with a numerical aperture of 0.33. This can used with a single pass or with a double-patterning as required.

The price of the high-NA EUV exposure machine is said to be about US$380 million or more than twice the approximately US$180 million of the previous generation lower-NA EUV machines. The question remains as to whether the second high-NA EUV lithography scanner is for Samsung or TSMC. Or another commercial machine for Intel as it plans to start making chips with high-NA EUVL using its 18A manufacturing process in 2025.

ASML announced net income of €1.2 billion in sales revenue of €5.3 billion for the 1Q24. The quarterly net bookings for 1Q24 were €3.6 billion of which €656 million is EUV.

Related links and articles:

News articles:

Intel Fellow discusses high-NA EUV lithography progress

Huawei pursues quad patterning to make 5nm chips

Intel video shows high-NA EUV lithography machine installation

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