Capacitive humidity MEMS sensor enables high linearity in 20-80% relative humidity
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eeNews Europe
Many existing humidity sensors are resistive sensors, but in dry conditions (around 20% RH) or conditions close to dew point (around 80% RH) output was inconsistent, or measurements might deviate from the actual levels. Capacitive humidity sensors, too, despite their high-precision sensing capabilities, were costly to incorporate into appliances. The HSHCA Series capacitive humidity sensor was developed applying MEMS process technology, it employs proprietary sensing film for the sensor part to realize excellent linearity over a broad—low to high—humidity range and therefore superior sensing precision. It supports measurements in the 0-100% relative humidity range.
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