MENU

CEA-Leti makes smallest MEMS gyroscope for navigation

CEA-Leti makes smallest MEMS gyroscope for navigation

Technology News |
By Peter Clarke



The sensor has a footprint of 1.3 square millimeters and this was achieved by making use of a nano-resistive sensing.

To reach the small size the key parameters of bias instability an angular random walk needed to be improved by a couple of orders of magnitude compared to commercial MEMS gyroscopes.

CEA-Leti, in collaboration with Politecnico di Milano, reached these targets by demonstrating performance matching the best state of the art on ultra-miniaturized MEMS gyroscopes. The results were reported in a paper, “1.3 mm2 Nav-Grade NEMS-Based Gyroscope”, in the Journal of Microelectromechanical Systems.

“This improved performance must not come with a high cost so the device will be priced competitively in large-volume markets, such as the automotive and consumer markets,”

The gyroscopes do not exceed 2 square millitmeters per axis of measurement and are made using standard MEMS technology and wafer-level vacuum packaging, said Philippe Robert, MEMS business development manager at CEA-Leti, in a statement. The team also ensured the resonant frequency is greater than 25kHz to withstand conventional vibration environments.

The CEA-Leti and Politecnico di Milano NEMS-based gyroscope is compatible with standard MEMS foundries for high-volume markets such as the automotive industry. The team is working on 3-axis gyroscope co-integration.

“This architecture enables best-in-class MEMS gyroscopes in terms of overall performance, size and resonant frequency, and our breakthrough 1.3 square millimeter high-frequency device is already at the state-of-the-art performance in terms of noise, bias stability, scale range and bandwidth,” said Robert. “Several design and technology improvements are right now under investigation.”

Manufactured on CEA-Leti’s silicon pilot line, these gyroscopes can be co-integrated with high-performance 3-axis accelerometer and barometric-pressure sensors. Because it is compatible with most MEMS foundry processes, this technology could reach markets within two years, the research institute said.

Related links and articles:

www.leti.fr

www.polimi.it

News articles:

Qualtre launches single-axis BAW MEMS gyro

MEMS microphones help move audio components market

Photonic gyro startup raises funds, works with Tower Semi

If you enjoyed this article, you will like the following ones: don't miss them by subscribing to :    eeNews on Google News

Share:

Linked Articles
10s