Coventor expands scope of MEMS modeling software
The combination improves speed and visualization for MEMS the related IC design, the company claimed.
The MEMS+ design modeling software was introduced in 2009 and operates as link between the physical and mechanical analysis of finite element analysis (FEA) and electrical modeling of EDA tools as used to develop the ASIC that accompanies the MEMS device.
The software allows the creation of models of mechanical system models and their electrical coupling from a library of parametric structures. FEA is still required but it is painfully slow. The use of MEMS+ can provide quick optimizations of MEMS design and the creation of multiple models for Monte Carlo analysis.
MEMS+ 5.0 features an expanded modeling library to enable simulation of a greater variety of devices, with a particular focus on the unique challenges of micro-mirrors and piezo-electric devices.
Additions to the library of parametric models include: electrostatic comb drive models between movable and flexible structures, improved side electrode and side contact models, support for modeling out-of-plane flexible structures such as corrugations an improved modeling of piezo-electric sensors and actuators.
The software also adds a new capability to create and export reduced-order models (ROMs) to the Matlab Simulink environment to enable non-linear simulations of MEMS-based systems. This supplements the existing capability to export ROMs in Verilog-A format for simulations of MEMS with electronics in widely used EDA simulators such as the Cadence Spectre circuit simulator.
Exported ROMs simulate up to 100 times faster than fully non-linear MEMS+ models, which have been valuable to MEMS designers but are too slow for ASIC designers. During model generation, designers can select one or more non-linear input variables; all other input variables are linearized about selected non-linear operating points.
The new reduced order modeling and simulation capabilities are particularly suited for large scaled multi-mass gyros with hundreds of comb fingers or resonators made of many flexible elements.
The MEMS+ suite enables MEMS and IC designers to rapidly explore and optimize designs in parallel in the MathWorks Matlab/Simulink and Cadence Virtuoso environments. It complements the CoventorWare and SEMulator3D suites. The platform is applicable to accelerometers, gyroscopes, microphones, microprojectors and many other types of MEMS sensors and actuators.
Related links and articles:
News articles:
Coventor upgrades MEMS design software
MEMS design software gets 64-bit upgrade
Imec, Coventor partner for MEMS
Bringing MEMS into the IC design flow
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