Designing closed-loop MEMS-based capacitive inertial sensors
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eeNews Europe
In addition, micromachined inertial sensors are widely used in vibration monitoring in industry, automotive safety and stability control, and navigation. In general, micro-sensors can be piezoelectric, piezoresistive or capacitive. However, the high thermal stability and high sensitivity of capacitive sensing makes it more attractive for a wide range of applications.
Read the full article on page 38 of our March digital edition
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