Dutch government revokes license for ASML DUV lithography shipment

Dutch government revokes license for ASML DUV lithography shipment

Business news |
By Nick Flaherty

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The Dutch government has revoked an export license for the shipment of leading edge chip making equipment to China.

The export license for the NXT:2050i DUV lithography systems and its NXT:2100i successor from ASML impacts a small number of customers in China, says the company, based in Veldhoven, the Netherlands.

“We do not expect the current revocation of our export license or the latest U.S. export control restrictions to have a material impact on our financial outlook for 2023,” it said in a statement.

The company had previously resisted calls to restrict shipments of lithography equipment to China.

The NXT:2100i in particular incorporates a new lens distortion manipulator that provides chipmakers with improved correction and improves DUV-EUV cross-matching overlay. This is a key issue for Chinese companies looking to build leading edge chips at 5nm and below. 

In recent discussions with the US government, ASML said it had obtained further clarification of the scope and impact of the US export control regulations. The latest US export rules, published October 17, 2023, impose restrictions on certain mid critical DUV immersion lithography systems for a limited number of advanced production facilities.

ASML said it is fully committed to comply with all applicable laws and regulations including export control legislation in the countries in which it operates.

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