E-beam lithography for security ICs set up in Taiwan.
The facility is being set up at the university under the (MEB12) program as an industry-academic alliance to provide the world’s first development and pilot production for security chips with unique IDs. Intended applications include information security for the Internet, artificial intelligence, electronic payment and automotive chips.
The MEB12 program participants include: multibeam e-beam lithography supplier Mapper Lithography BV and EDA company Synopsys Inc. Screen is supporting the MEB12 program with lithography coat/develop track and single wafer cleaning systems.
The MEB12 project will allow Taiwanese and neighboring Asian semiconductor IC design and manufacturing companies to become members and gain access to facility
“In addition to developing security chips, it can also be used as a maskless IC design verification platform, which serves startup IC design companies by significantly reducing the soaring costs derived from the photomasks, and a low-cost foundry service with high resolution and high graphic-flexibility for the niche applications,” said Professor Po-Wen Chiu of NTHU’s Department of Electrical Engineering and chairman of the Center for Nanotechnology, Materials Science, and Microsystems, in a statement issued by Screen.
Screen, previously known as Sokudo, has acquired the semiconductor equipment business from its predecessor, Dainippon Screen and underwent a name change on October 1, 2017.
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