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Fogale buys Altatech for high-end metrology presence
The acquisition enables Fogale to provide a full range of inspection and metrology tools to address high-throughput 2D, 3D and full wafer inspection for 3D IC TSV, advanced packaging, MEMS, LED and substrate applications.
Fogale said the acquisition would being “necessary critical mass” to drive leadership in metrology, inspection and deposition business for the semiconductor manufacturing industry.
Altatech was founded in 2004 to provide equipment for wafer defect inspection. It develops inspection and chemical vapor deposition (CVD) technologies used for manufacturing of semiconductors, LEDs, MEMS and photovoltaic devices.
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News articles:
R&D group begins TSV chip pilot production
Altatech enters LED inspection market
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