GloFo 45nm RFSOI process ready for 5G
The foundry also revealed Skyworks Solutions Inc. (Woburn, Mass.) as an early customer for the process.
The technology supports operation in mmWave spectrum from 24GHz up to 100GHz and RF features supported in the process make it suitable for millimeter-wave beamforming applications in 5G smartphones and basestations, Globalfoundries said.
The 45RFSOI process also has back-end-of-line (BEOL) features – including thick copper and dielectrics – that enable improved RF performance for LNAs, switches and power amplifiers. Other suitable applications include internet broadband via low-earth-orbit (LEO)satellite and front-end modules for 5G.
The 45RFSOI process has a substrate resistivity of greater than 40 ohm-cm that maximizes the quality factor for passive devices, reduces parasitic capacitances and minimizes disparity in phase and voltage swing.
The process is manufactured at Globalfoundries’ 300mm wafer fab in East Fishkill, New York, and it builds on a partially-depleted SOI technology base that has been in high-volume production since 2008.
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