High-end coating technology upgrade for sensor production
Bühler Leybold Optics, a specialist in the development of vacuum thin-film coating machines, announced it has developed a new high-end technology for the production of sensors as part of the Highly Integrated Optical Sensors (HIOS) project.
Over the past 3 years, Bühler Leybold Optics further developed its HELIOS technology. Upgrading its existing HELIOS 800 system to the HELIOS 800 Generation II to enable coatings with almost zero particle contamination for 200mm wafers. The company also developed the HELIOS 1200 system, allowing significantly higher throughput and coatings of larger substrates up to 300mm wafers.
The developments were executed in a HIOS consortium as part of the EU-funded Horizon-2020 Grant Agreement nr. 720531. As the project achieved excellent results in terms of quality of the interference filters, the technology is now being implemented in new spectral color sensors for applications with UV, visible and infrared wavelengths.
HIOS project – www.fti-hios.eu
Bühler Leybold Optics – www.buhlergroup.com
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