Morgan’s CVD Silicon Carbide (SiC) and Pyrolytic Boron Nitride (PBN) materials are ideal for use in semiconductor applications, including rapid thermal processing and plasma etch process chamber components, as well as metalorganic CVD tools for high-brightness white LED manufacturing using the indium gallium nitride process.
Morgan’s improved CVD SiC growth capability enables the manufacture of 300+ millimeter diameter components with thicknesses of more than 10 mm at production volumes for recently developed plasma etch applications. With access to world class ultrasonic machining capability, Morgan offers high tolerance CNC machining and precision hard grinding, as well as the patented Rmax process for producing focus CVD SiC ring shapes.
Morgan’s high purity (99.999 percent+) SiC material has high thermal conductivity, is resistant to chemical erosion, and features minimal particulate generation, making it ideal for use in chlorine and fluorine plasma etch processes. The material is ideally suited for use in producing GDMs (gas distribution plates) where the material’s erosion resistance can lead to long life and extended tool PM schedules. Ultrasonic drilling can provide holes with diameters as small as 0.5mm, ideal for custom etch applications.
High purity (99.99 percent+) PBN materials have a working temperature in excess of 1500°C, and feature high electrical resistivity and high dielectric strength. Extremely low out-gassing, non-wetting, and non-toxic, the PBN materials are inert to most acids, alkalis and organic solvents and have high thermal conductivity in the “a” direction. The advanced materials are a good choice for manufacturers of PBN coated graphite heaters and PBN effusion cell components.
The technical storage or access is strictly necessary for the legitimate purpose of enabling the use of a specific service explicitly requested by the subscriber or user, or for the sole purpose of carrying out the transmission of a communication over an electronic communications network.
The technical storage or access is necessary for the legitimate purpose of storing preferences that are not requested by the subscriber or user.
The technical storage or access that is used exclusively for statistical purposes.The technical storage or access that is used exclusively for anonymous statistical purposes. Without a subpoena, voluntary compliance on the part of your Internet Service Provider, or additional records from a third party, information stored or retrieved for this purpose alone cannot usually be used to identify you.
The technical storage or access is required to create user profiles to send advertising, or to track the user on a website or across several websites for similar marketing purposes.