Imec and Mitsui Chemicals sign strategic partnership
Imec and Mitsui Chemicals sign strategic partnership agreement to commercialize CNT pellicle technology for EUV lithography – imec press release
Imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, and Mitsui Chemicals, a leading Japanese chemical company and EUV pellicle supplier, today announce the start of a strategic partnership on the commercialization of carbon-nanotube (CNT) based pellicles for extreme ultraviolet (EUV) lithography. Under this partnership, Mitsui Chemicals will integrate imec’s fundamental CNT-based pellicle innovation into Mitsui Chemicals’ pellicle technology to achieve full production specifications, targeting its introduction in high-power EUV systems in the 2025-2026 timeframe.
“Imec has a long history of supporting the semiconductor ecosystem to advance the lithography roadmap. Since 2015, we collaborated with partners throughout the supply chain to develop an innovative CNT-based pellicle design for advanced EUV lithography,” says Steven Scheer, Senior Vice President Advanced Patterning, Process and Materials at imec. “We are confident that the in-depth knowledge we have on the metrology, characterization, properties and performance of CNT membranes will accelerate Mitsui Chemicals’ product development. Together, we hope to bring CNT pellicles into production for future generations of EUV lithography.”
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