The device has a fin width of 13nm and 50nm gate length and was fabricated in a CMOS-compatible process in IMEC’s 300mm wafer clean room.
The device has a demonstrated detection limit of tens of molecules. IMEC said that it is working towards the detection of single DNA molecules. With arrays of such BioFETs working together high-throughput and cost-effective biological assay tools could be possible.
The device works by allowing biomolecules to bind to the chemically modified dielectric surface of the gate. This alters the threshold voltage resulting in a measurable
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