Linear piezo nanopositioning stages offer 0.02nm resolution

Linear piezo nanopositioning stages offer 0.02nm resolution

New Products |
By Julien Happich

With a direct-metrology, capacitive sensor feedback option, high resonant frequencies up 6300Hz and high load capacity, the QNPHD is well suited for a wide range of high-speed and high-precision applications such as scanning probe microscopy, disc-drive testing, and semiconductor wafer articulation.

A direct-drive actuation design and optimized structure enable millisecond response and move-and-settle times. FEA optimized precision flexures ensure high-stiffness, long device life, and high-dynamics while maintaining excellent geometric performance (straightness and angular errors) for critical nanopositioning applications.

Optional closed-loop feedback using a unique capacitive sensor design allows for 0.02nm resolution and 0.02% linearity errors. The capacitive sensors measure the output of the positioning carriage directly enabling superior accuracy and repeatability.

The QNPHD is available with rear and side cable exit options along with mounting features for both horizontal and vertical orientations.

Visit Aerotech at

If you enjoyed this article, you will like the following ones: don't miss them by subscribing to :    eeNews on Google News


Linked Articles