Mass air flow MEMS sensors cover the 30 to 1000 sccm range
The PMFc3000 offers an initial output tolerance off less than 2% full scale. The sensor die uses a pair of compound thermopiles surrounding a central heating element to detect changes in temperature gradient caused by mass flow, delivering excellent signal-to-noise, and unsurpassed repeatability. The sensor’s internal signal conditioning circuitry leverages an off-the-shelf microcontroller, providing proven reliability and low cost. The unit covers the ranges from 30 to 1000 sccm (standard cubic centimeter/minute) and can be special ordered with any full scale range between 10 and 2,000, balancing customers’ need for performance and cost efficiency. The sensors are fully calibrated and compensated over the temperature range of 0 to 50ºC
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