Mass flow controller offers high accuracy and long-term stability
Sensirion’s mass flow controller covers a wide control range of 1000:1 and offers an ultra-fast settling time of 50 milliseconds. These features and performance data are based on the company’s proprietary CMOSens technology which combines sensor element as well as the analog and digital signal processing circuitry on a single CMOS chip. The sensor signal is converted into a fully calibrated and temperature compensated digital signal – all directly on the chip. The SFC5000 mass flow converter offers both analog and digital interfaces, enabling new features such as optional multigas recognition and self-test capability.
The device can be used with pressures of up to 10 bar (145 psi) and is resistant to electromagnetic interference. Due to the high reaction speed of the flow chip combined with fast control algorithms, inlet pressures can be regulated in real-time and thus providing a stable output flow profile. The mass flow controller features a vacuum-tight stainless steel package of the flow chip which is mounted on a sturdy aluminium or stainless steel flow body. This feature set makes the SFC5000 ideal for monitoring and controlling mass flow in applications such as analytical instrumentation, process automation, plasma etching and deposition and medical equipment.
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