MEMS-based sensor targets low-power and IoT markets
The cantilever, created using MEMS techniques, can be coated with a chemical layer design to attract a specific target chemical or molecule. As these adhere to the beam they affect the mass and how much it is deflected.
Light is bounced off the underside of the cantilever. Source: Panorama Synergy Ltd.
The silicon photonics use a diffraction grating to redirect photons towards the underside of the cantilever beam. The distance traveled depends on how far the cantilever beam is deflected, which in turn can be calibrated to identify a particular chemical. The sensor can be used in mining, industrial and medical applications to detect such chemicals as benzene, hydrogen, cancer cells.
It is also possible to characterize multiple cantilevers for different chemistries in a single unit.
Next: Video of operation
Panorama Synergy is supplying its MEMS sensors to another Western Australia company Quantify Technology Pty Ltd. (Bentley, Western Australia) for inclusion in its "intelligent building" platform. Panorama Synergy has agreed to supply air quality sensors to be included in the power management and control systems being supplied by Quantify Technology. Quantify has secured orders worth Aus$2 million (about $1.56 million) for its technology with deliveries to start before the end of 2015.
The LumiMEMS technology was developed by the Microelectronics Research Group at the University of Western Australia, in partnership with Panorama Synergy. Panorama Synergy’s board of directors includes Jason Chaffey, formerly managing director of Bluechiip, a MEMS manufacturer based in Australia.
Related links and articles:
Panorama Synergy
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