MEMS, sensors get four sessions at IEDM 2015

MEMS, sensors get four sessions at IEDM 2015

Technology News |
By eeNews Europe

Four sessions have been set for MEMS and sensors; sessions 13, 18, 29 and 33.

Session 13: Sensors, MEMS, and BioMEMS – Focus Session – Silicon-based Nano-devices for Detection of Biomolecules and Cell Function
Tuesday, December 8, 9:00 a.m.

Jefferson Room
Co-Chairs: Yuji Miyahara, Tokyo Medical and Dental University
Severine LeGac, University of Twente

9:05 a.m.
13.1 Ultra Low Power Sensor Platforms for Personal Health and Personal Environmental Monitoring (Invited), V. Misra , B. Lee, P. Manickam*, M. Lim, S. Khalid Pasha* , S. Mills and S. Bhansali*, North Carolina State University *Florida International University.
We report a simple fabrication technique to create nanostructured p-type SnO sensor and demonstrate highly sensitive and selective ozone gas sensor to detect the ozone level down to 25 ppb at room temperature with total power consumption of 65 uW. This sensor enables for continuous and ultra-low power wearable application.

9:30 a.m.
13.2 Highly Integrated CMOS Microsystems to Interface with Neurons at Subcellular Resolution (Invited), A. Hierlemann, ETH Zurich
We demonstrate that CMOS high-density microtransducer arrays featuring several thousands of transducers (e.g. >3,000 electrodes per mm2)can be used to record from or stimulate potentially any individual neuron or subcellular compartment on the CMOS chip. High- and subcellular-resolution recordings of individual neurons and networks are presented.

9:55 a.m.
13.3 High Throughput Miniaturized Cell Sorter Based on Lensfree Imaging of Cells (Invited), L. Lagae, D. Vercruysse, A. Dusa, C. Liu, K. de Wijs, R. Stahl, G. Vanmeerbeeck, B. Majeed, Y. Li, and P. Peumans, IMEC
A novel optofluidic device for high throughput cell sorting is demonstrated. The device combines CMOS based imaging of cells in fluidic channels with sorting based on thermal bubble generation through microheaters. The throughput is 1000 cells/s per channel with potential to sort millions of cells based on dense multichannel integration.

10:20 a.m.
13.4 Lensfree Microscopy: A New Framework For the Imaging of Viruses, Bacteria, Cells and Tissue (Invited), C. Allier, S. Vinjimore*, Y. Hennequin*, O. Cioni*, F. Momey*, T. Bordy, L. Hervé, J.-G. Coutard, S. Morel, A. Berdeu, F. Favarro, and J.-M. Dinten, CEA LETI, MINATEC
Lensfree imaging is an emerging microscopy technique based on in-line holography as invented by Gabor in 1948. Albeit the existence of the method since decades, the recent development of digital sensors, helped the realization of its full potential. Over the recent years, the performance have tremendously increased while keeping the design simple, robust, and at a reasonable low cost. The detection ability improved from 10 µm (cell) in 2009, to 1 µm (bacteria) in 2010 , down to 100 nm beads in 2012, paving the way to the detection of viruses in 2013.

10:45 a.m.
13.5 Precision Mass Measurements in Solution Reveal Properties of Single Cells and Bioparticles (Invited), S. Olcum, N. Cermak, and S. Manalis, Massachusetts Institute of Technology
Micro- and nanomechanical resonators enable mass measurements of single analytes with extraordinary precision. However the performance of these devices degrades when operated in solution due to viscous loss. The suspended microchannel resonators (SMR) were developed to overcome this limitation. The SMR is a mechanical resonator comprised of a microfluidic channel running through a cantilever oscillating at its resonant frequency. As particles flow through the integrated channel, the resonant frequency of the cantilever is transiently modulated by the particle’s buoyant mass, enabling precise mass measurements in solution. Here, we will discuss the recent advancements of the SMR technology that enabled the quantification of single cell growth and density, and resolving nanoparticles down to 10 nm with single attogram precision. Finally, we will present a technology for simultaneously monitoring multiple resonances that enabled high throughput growth rate measurements. We will show how the same technology can potentially determine the shape of nanoparticles along with their masses.

11:10 a.m.
13.6 Fabrication and Analysis of SiN Nanopores for Direct DNA Sequencing (Invited), I. Yanagi, Y. Goto, R. Akahori, K. Matsui, Y. Nara, T. Yokoi, and K.-i. Takeda, Hitachi, Ltd.
This paper summarizes the latest developments of solid-state nanopores in our laboratory. For the realization of direct DNA sequencing with solid-state nanopores, a simple method to precisely fabricate nanopores with diameters of 1 to 3 nm has been developed. From the measurements of translocation events of DNA through the fabricated nanopores, it was confirmed that single-stranded DNA (ssDNA) could pass through the nanopore even when the diameter of nanopore is down to 1.2 nm. In addition, it was discovered that the translocation speed of single-stranded DNA is faster than that of double-stranded DNA (dsDNA) by two or three orders of magnitude.

Next: Resonators, sensors and actuators

Session 18: Sensors, MEMS, and BioMEMS – M/NEMS Resonators, Sensors and Actuators
Tuesday, December 8, 2:15 p.m.
Georgetown Room
Co-Chairs: Debbie Senesky, Stanford University
Maryam Ziaei, iSono Health

2:20 p.m.
18.1 Energy-Delay Performance Optimization of NEM Logic Relay, C. Qian, A. Peschot, D. Connelly, and T.-J. King Liu, University of California, Berkeley
A methodology for optimizing the energy-delay performance of a nano-electro-mechanical relay is developed. Contrary to popular belief that structural stiffness should be minimized to achieve minimum switching energy, this work shows that the effective spring constant should be relatively large. The optimal energy-delay of an aggressively scaled NEM relay (with 5 nm contact gap as-fabricated) is presented.

2:45 p.m.
18.2 A Two-Gap Capacitive Structure for High Aspect-Ratio Capacitive Sensor Arrays, Y. Tang, and K. Najafi, University of Michigan, Ann Arbor
This paper reports a new device structure and fabrication process for achieving a small sensing gap (<5µm) and very thick (>500µm) silicon structures for high aspect-ratio capacitive sensor arrays. We demonstrate improved sensitivity by a 2-gap process, creating a small gap near the top of thick capacitive accelerometer arrays.

3:10 p.m.
18.3 Polysilicon Nanowire NEMS Fabricated at Low Temperature for Above IC NEMS Mass Sensing Applications, I. Ouerghi, M. Sansa, W. Ludurczak, L. Duraffourg, K. Benedetto, P. Besombes, T. Moffitt*, B. Adams*, D. Larmagnac*, P. Gergaud, C. Poulain, A.-I. Vidana, C. Ladner, J.-M. Fabbri, D. Muyard, G. Rodriguez, G. Rabille, O. Pollet, P. Brianceau, S. Kerdiles, S. Hentz, and T. Ernst, CEA LETI, MINATEC, *APPLIED MATERIALS
In this work, we demonstrate for the first time the performance of polysilicon NEMS fabricated with a low temperature process compatible with a NEMS above IC 3D integration. Most important figures of merit feature values still competitive in comparison to mono-crystalline NEMS: Allan deviation, quality factor (Q), Signal-to- Background ratio, Dynamic Range, yield and variability, piezoresistive and elastic properties. We found the best process window (laser annealing conditions and dopant concentration) to optimize poly-Si NEMS with excellent features compared to conventional c-Si NEMS. The goal of this study is to replace c-Si for low cost 3D integration.

3:35 p.m.
18.4 A Reliable CMOS-MEMS Platform for Titanium Nitride Composite (TiN-C) Resonant Transducers with Enhanced Electrostatic Transduction and Frequency Stability, M.-H. Li, C.-Y. Chen, and S.-S. Li, National Tsing Hua University.
A reliable CMOS-MEMS platform for on-chip resonant transducer and readout circuit integration is presented in this paper with (i) well-defined etch stops and relaxed release windows for high fabrication yield, (ii) narrow transducer gaps (< 400 nm) for efficient electrostatic transduction, and (iii) novel titanium nitride composite (TiN-C) structure for dielectric charge elimi-nation and temperature compensation. With the proposed platform, MEMS resonant transducers which exhibit low frequency drift over temperature and time, excellent electrostatic coupling, and inherent CMOS circuit integration are successfully demonstrated.

4:00 p.m.
18.5 Spurious Mode Suppression in SH0 Lithium Niobate Laterally Vibrated MEMS Resonators, Y.-H. Song, and S. Gong, University of Illinois at Urbana Champaign
This paper reports on the first development of a spurious mode suppression technique in LN-LVRs that employs the optimized overlapping length between adjacent electrodes. Simultaneously, the device features a very high figure of merit (FoM = 220), among the highest reported for micromechanical resonators.

4:25 p.m.
18.6 Super High Frequency Lithium Niobate Surface Acoustic Wave Transducers up to 14 GHz, M. Ali Mohammad, X. Chen, B. Liu, Y.Yang, and T.-L. Ren, Tsinghua University
We report superior performance LiNbO3 surface acoustic wave (SAW) transducers with the smallest linewidth (30 nm) and highest resonant frequency (14 GHz). SHF (>3 GHz) SAW devices are systematically studied taking into account various substrate, design, process, and performance considerations. Device metrics are obtained and compared with other state-of-the-art research.

4:50 p.m.
18.7 Output Enhancement of Triboelectric Energy Harvester by Micro-Porous Triboelectric Layer, D. Kim, B.-W. Hwang, J.-W. Han*, M.-L. Seol, Y. Oh, and Y.-K. Choi, Korea Advanced Institute of Science and Technology (KAIST), *NASA Ames
A micro-porous polymer film is utilized as a triboelectric layer of triboelectric energy harvester. The relationship between porosity of the triboelectric layer and output characteristics is analyzed for the first time. Experiment, modeling, and simulation based on electrodynamics are performed to investigate how the two parameters affect the output performance.

Next: BioMEMS

Session 29:
Sensors, MEMS, and BioMEMS – Devices for In Vitro Bioanalytics and In Vivo Monitoring
Wednesday, December 9, 9:00 a.m.
Jefferson Room
Co-Chairs: Carlotta Guiducci, Ecole Polytechnique Fédérale de Lausanne
Theresa Mayer, Penn State

9:05 a.m.
29.1 Field-Effect Control of Ions Beyond Debye-Screening Limit in Nanofluidic Transistors, Q. Ran, Y. Liu*, and R.W. Dutton, Stanford University, *Zhejiang University
We investigate the field-effect control of ions in nanofluidic transistors (NFTs) with characteristic channel size (~100nm) significantly larger than the system’s Debye length (~10nm). These 100nm NFTs achieve an ionic current modulation ratio of ~2.5, demonstrating better performance than the state-of-the- art 20nm NFTs. The result attests a new operating regime beyond the Debye-screening limit. The relaxed constraint on channel size offers advantages in device manufacturing, testing, and reliability. It also opens up new applications in biological sensing and sample preparation.

9:30 a.m.
29.2 High Performance Dual-Gate ISFET with Non-ideal Effect Reduction Schemes in a SOI-CMOS Bioelectrical SoC, Y.-J. Huang, C.-C. Lin, J.-C. Huang, C.-H. Hsieh, C.-H. Wen, T.-T. Chen, L.-S. Jeng, C.-K. Yang, J.-H. Yang, F. Tsui, Y.-S. Liu, S. Liu, and M. Chen, Taiwan Semiconductor Manufacturing Company
A SOI-CMOS dual-gate ion-sensitive FET which enables non-ideal effect reduction and detection sensitivity boosting is presented. Through an innovative scheme using the bottom-gate transistor instead of the fluidic-gate transistor for sensing, the signal-to-noise ratio is improved by 155x, time drift is reduced by 53x, and hysteresis is reduced by 3.7x.

9:55 a.m.
29.3 1.3 Mega pixels CCD pH Imaging Sensor with 3.75 µm Spatial Resolution (Invited), Y. Edo, Y. Tamai, S. Yamazaki, Y. Inoue, Y. Kanazawa, Y. Nakashima, T. Yoshida, T. Arakawa, S. Saitoh, M. Maegawa, M. Ohnishi, M. Kitao, T. Nakahashi, Y. Suzuki, F. Dasai*, J. Nakai, H. Kawanishi, N. Awaya, and S. Sawada*, Sharp Corporation, *Toyohashi University of Technology
We have demonstrated for the first time a megapixel CCD pH imager featuring a flash-injection-of-signal-electrons scheme. With a spatial resolution of 3.75um and pH resolution of 0.16pH at 27.5fps we believe this is a promising device technology for applications such as high throughput DNA sequencing and label-free cell measurement system with sub-cell-size spatial resolution and real-time response.

10:20 a.m.
29.4 A Microfabricated Electronic Microplate Platform for Low-cost Repeatable Bio-sensing Applications, M. Zia, T. Zhi, C. Zheng, P. Thadesar, T. Hookway*, J. Gonzalez, T. McDevitt*, H. Wang, and M. Bakir, Georgia Institute of Technology, *Gladstone Institute of Cardiovascular Disease
A disposable ‘electronic microplate’ 3D IC platform allowing reusability of a CMOS biosensor thereby reducing cost and increasing throughput is presented. The electronic microplate utilizes mechanically-flexible interconnects and through- silicon-vias to electrically connect the electrodes on the CMOS biosensor to the electrodes on the electronic microplate, while maintaining a physical separation.

10:45 a.m.
29.5 High Density Optrode-electrode Neural Probe using SixNy Photonics for In Vivo Optogenetics, L. Hoffman, M. Welkenhuysen, A. Andrei, S. Musa, Z. Luo, S. Libbrecht*, S. Severi, P. Soussan, V. Baekelandt*, S. Haesler*, G. Gielen, R. Puers, and D. Braeken, IMEC, *KULeuven
Moore’s law in neural sciences. We present a probe with the highest integration density of optrodes- electrodes using a CMOS process platform and 193 nm lithography. We designed, developed, and packaged an ultrathin (30 um) neural probe, co- integrating silicon nitride (SixNy) photonics and biocompatible titanium nitride (TiN) electrodes. Functionality was verified in vivo by optically evoking and electrically recording neuronal activity in a mouse brain.
11:10 a.m.

29.6 An Ultra Thin Implantable System for Cerebral Blood Volume Monitoring Using Flexible OLED and OPD, Y. Kim, C. Choi, E. Chen, A. Daniel*, A. Masurkar, T. Schwartz*, H. Ma*, and I. Kymissis, Columbia University, *Weill Cornell Medical College
We fabricate and demonstrate an ultra-thin (5um) implantable system using organic light emitting diodes and organic photodetectors into a reflectivity monitoring system suitable for hemodynamic measurement of the brain. This system is the first of its kind to record in-vivo measurements of cerebral blood volume and seizure-related activity.

11:35 a.m.
29.7 An Ultraflexible Microbubble Blood Pressure Sensor for Interventional Treatment, L.J. Tang, and J. Liu, Shanghai Jiao Tong University
We report an ultraflexible microbubble blood pressure sensor employs a micro blood bubble for transduction. Micro blood bubble was generated spontaneously by capillary forces. Hydrostatic pressure measurement was demonstrated in rat blood. The sensor was finally mounted on an acupuncture needle (0.38mm diameter) to assemble into a pressure wire.

Next: Nanodevices and nano-arrays

Session 33: Sensors, MEMS, and BioMEMS – Emerging Nanodevices and Nanoarrays
Wednesday, December 9, 1:30 p.m.
Jefferson Room
Co-Chairs: Dimitrios Peroulis, Purdue University
Naigang Wang, IBM T.J. Watson Research Center

1:35 p.m.
33.1 High Performance and Reliable Silicon Field Emission Arrays Enabled by Silicon Nanowire Current Limiters, S. Guerrera, A. Akinwande, Massachusetts Institute of Technology
We report a high current density (J > 100 A/cm2) cold cathode based on silicon field emitter arrays that operates at low voltage (VGE < 60 V), and has long lifetime. A unique device architecture regulates electron flow to each field emitter tip with a silicon nanowire current limiter.

2:00 p.m.
33.2 Eliminating Proximity Effects and Improving Transmission in Field Emission Vacuum Microelectronic Devices for Integrated Circuits, E. Radauscher, K. Gilchrist*, S. Di Dona, Z. Russell, J. Piascik*, C. Parker, B. Stoner*, and J. Glass, Duke University, *RTI International
This work evaluates crosstalk and transmission efficiency in integrated field emission vacuum microelectronic devices (FE-VMDs). Experimental evidence was used to show proximity effects cannot be neglected. Simulations were used to understand the root cause, design structural solutions, and improve overall device performance. New design features are proposed for improved integration.

2:25 p.m.
33.3 A New Plasma Device Operated in Liquids for Biological Applications, M. Egawa, S. Imai, Y. Sakaguchi, A. Odagawa, Panasonic Corporation
We propose a new MEMS device generating planar plasma in liquids for biological applications. The device was designed with 10 mm distances between via-holes with 2D-FEM. Electric double layer formed by aging at high voltages reduces any resistance variations. Ignored these variations, our device can generate plasmas at nine via-holes.

2:50 p.m.
33.4 Artificially Intelligent Nanoarrays for Disease Detection via Volatolomics (Invited), H. Haick, Technion – Israel Institute of Technology
According to recent reports, more than 15 million deaths occur annually due to infectious diseases1 and approximately 57 million deaths occurred in 2008 from non-communicable diseases including cancer2. The spectrum of currently available medical methods does not enhance detection of many diseases, primarily due to technology limitations and their complexities, causing a delay in diagnosis.1-3 For this reason, there is an urgent need for inexpensive and minimally invasive technology that would allow efficient early detection, stratifying the population for a personalized therapy, and for rapid bed-side assessment of treatment efficacy. An emerging approach that has a high potential to fulfill these needs is based on the so-called “volatolomics”, viz. chemical processes involving profiles of highly volatile organic compounds (VOCs) which are by-products of metabolic and pathological processes and are emitted from various body fluids including breath, skin, urine, blood, and others. 3- 6

3:15 p.m.
33.5 Flexible Graphene Hall Sensors with High Sensitivity, L. Huang, Z. Zhang, B. Chen, and L.-M. Peng, Peking University
Graphene has an extremely thin body and high mobility and is thus an outstanding material for constructing ultra-sensitive Hall sensors. In this work, we massively fabricated graphene Hall elements (GHEs) with sensitivity up to 2300 V/T, and demonstrated flexible GHEs with high linearity and high stability against bending.

3:40 p.m.
33.6 Suspended AlGaN/GaN Membrane Devices with Recessed Open Gate Areas for Ultra-low-Power Air Quality Monitoring, P. Offermans, A. Si-Ali, G. Brom-Verheyden, R. van Schaijk, K. Geens*, S. Lenci*, M. Van Hove*, and S. Decoutere*, imec/Holst Centre, *IMEC
We have developed a novel gas sensor platform for ultra-low-power air quality monitoring based on suspended AlGaN/GaN membranes fabricated on 8 inch Si(111) wafers. The device shows excellent sensitivity to NO2 with exceptionally little humidity interference. We show extension of the platform to NH3, H2 and CO2 detection.

Related links and articles:

IEDM technical program

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