MEMS wafer fab contents for sale: $5 million ONO

MEMS wafer fab contents for sale: $5 million ONO

Business news |
By Peter Clarke

It is not known who the owner is but the location is described as being “east coast”

Other clues to the identity of the foundry include the fact the clean room measures 9,500 square feet (about 880 square meters) and is set up for manufacturing on 150mm diameter wafers although some equipment is 200mm wafer capable.

The sale is being advertised and brokered by MEMS Journal Inc. which states that the main use of the fab has been internal MEMS device production and R&D. The unnamed company has shut down the facility so the equipment will need to be moved to buyer’s preferred location.

The company has spent about $18 million on manufacturing equipment over several years and it was in good working condition when it was shut down in 2016. Capacity at the fab was 1,600 wafers per month, according to MEMS Journal.

Equipment in the sale includes: SPTS Omega fxP plasma etch system for deep silicon etch, LAM 4520XL dielectric etcher, Teikoku automated laminator, STS ProCVD tool, Tokyo Electron coat and develop track, STS multi-chamber cluster tool for deep RIE and XeF2 release, Canon FPA-2500i2 fine pattern aligner, and others.

For more information contact Mike Pinelis (

But if you know who the vendor we’d like to hear (

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