Memsstar upgrades MEMS etch and deposition
The Orbis family comprises three members: Alpha, 1000 and 3000.
The Orbis Alpha is for small volume production undertaken at institutions and universities engaged in MEMS R&D. The Orbis 1000 is a single-wafer vacuum load-lock system designed for commercial R&D. It uses the same processing techniques as Memsstar’s volume production systems, and can be upgraded to a production system as business conditions change. Supported process modules include Xerix oxide and silicon vapour-phase etch and Aurix self-assembled monolayer coatings.
The Orbis 3000 is an automated single-wafer system for high-volume production that also supports the Xerix etch and Aurix coatings process modules.
"We have spent a considerable time working with customers to enhance our single-wafer architecture and technology to ensure that it will meet their manufacturing requirements now and in the future. The ORBIS platform incorporates all of these advances, increasing system performance and delivering the industry’s most advanced release etch and surface modification equipment to our customers," said Tony McKie, CEO of Memsstar, in a statement.
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