Nano positioning system relies on magnetic levitation, achieves 10nm resolution
The platform levitates on a magnetic field that is generated by six coils and is actively monitored via a 6-D sensor. The magnetic field functions as a drive and actively guides the platform. The drive and the compact high-resolution measurement system with six degrees of freedom were developed so that the platform remains passive, in other words no cable connections are necessary. A two-dimensional, optically incremental measurement system records the position with capacitive sensors and serves to control the drive in all axes. In this way, objects can be moved linearly or rotationally on a plane with a previously unattained guiding accuracy.
"Currently, the PIMag 6D’ which is already quite an advanced development study can position with a resolution of 10 nm" explains Dr. Rainer Gloess, Head of Advanced Mechatronics at PI.
Such a nano-positioning system could replace air-bearing solutions and magnetic linear motors typically found in inspection and manufacturing systems, in the semiconductor industry.
"If the system moves on a circular path with a diameter of 100 nm, for example, the maximum deviation from the ideal path is only a few nanometers", added Gloess. The current prototype has a motion range of 100x100x0.15mm³ and supports trajectory motions at an acceleration of up to 2m/s2 and a velocity of up to 100 mm/s, with nanometer precision. The digital motion controller, based on a modular system from PI, can process different geometry files as well as coordinate transformations and offers an optimum basis for a successful new product line.
Visit Physik Instrumente at www.pi.ws
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