Optical pen offers an axial resolution of 5nm for the precise measurement of micro-structures
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eeNews Europe
The axial resolution of around 5nm and a lateral resolution of 0.9µm make the CL0-MG210 well suited for high resolution measurements of micro-structures, from MEMs to micro-bumps or even to characterize the nano-roughness of a surface. Numerical aperture is around 0.67. The optical pen is able to make measurements on any type of materials, without any prior preparation of the sample.
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