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Power wafer-level testing and automated characterization

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By eeNews Europe

The ACS V5.0 update specifically leverages the high power capabilities of Keithley’s Model 2651A (high current) and Model 2657A (high voltage) System SourceMeter SMU instruments to enable automated wafer-level testing of high power semiconductor devices like power MOSFETs, IGBTs, BJTs, diodes, etc. High power device libraries have been designed for use with the Models 2651A (up to 50A or 100A when connecting two units) and 2657A (up to 3,000V) System SourceMeter SMU instruments that support testing multi-terminal power components in conjunction with lower power Series 2600B SourceMeter SMU instruments.

Support has been added for hardware scan, recognition, and configuration management of the high power Models 2651A and 2657A so users can quickly connect these instruments to a PC, confirm connectivity, and begin testing. Sample projects for tests such as high voltage wafer level reliability (WLR) build on the wide range of low power reliability test capabilities provided in earlier ACS releases, providing users with an excellent starting point for creating or modifying new tests quickly.

The software also supports the ±200V C-V capability of the Model 4200-CVU-PWR C-V Power Package option for the Model 4200-SCS Parameter Analyzer to provide a broad range of I-V and C-V measurement capability for full characterization of semiconductor power components.

Visit Keithley Instruments at www.keithley.com


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