The new sensors operate across w wide temperature range from -40 C to +85°C. Three pressure ranges are available, ranging from 10 cmH2O (0.15 psi) to 100 cmH2O (1.5psi). The devices are certified according to AEC-Q100 which makes them the suited for automotive applications. Two port variants are available for the selection of the housings: two vertical ports for the smallest possible installation space, or two horizontal ports for a low profile or a single vertical port for relative pressure measurements. The dual port versions allow to measure the pressure from the back of the MEMS sensor to protect the electrical components from corrosive media. The pressure sensors are typically operated at 3.3 or 5 volts.
The development of the sensors in an FEA-assisted electromechanical design process as well as the company’s in-house production based on state-of-the-art MEMS processing enable high quality and easy integration into many medical and industrial applications.
More information: www.si-micro.com