Replaceable, wear-resistant films extend electrostatic chuck lives
Applied as a final protective layer, the Diamonex technical hard-coats offer extended life benefits to new or refurbished ESCs.
The thin, wear-resistant films, made of diamond-like-carbon (DLC) and other nanocomposite materials, are adjusted to meet specific resistivity requirements of the ESC while protecting electronic layers and extending the overall life of the part. The films have a broad range of chemical resistance, meet chamber process compatibility requirements, and can withstand high-temperature heated chuck applications.
The hard-coats can be applied to new or refurbished ESCs, even for ESCs originally designed without a sacrificial wear layer. The technical films are available for CVD, PVD, etch and ion implant processes. The films feature mesa patterning for low defectivity and can be used in most high temperature processes.
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