
Sensor module for twin axis MEMS stimulation testing
The MT9928 expands the MEMS/sensor test portfolio for the flexible and modular MT9928 handler platform, which already includes multiple solutions for test and calibration of inertial MEMS/sensors.
The kitable and modular MT9928 platform, in combination with dedicated MEMS/sensor test modules, provides a highly flexible test setup which can easily be converted to different packages styles and MEMS/sensor applications.
The generic Multitest MEMS test approach deploys all features and functions of the standard handling system and addresses the MEMS specific requirements by adding MEMS/sensor test and calibration carts with dedicated stimulus boxes.
The new twin axis high g sensor test module is dedicated for X/Z stimulation of a MEMS device and allows for two axis testing in one stimulation. By applying one stimulation, cycle time can be saved and the packages need to be touched less often reducing the risk of damage during test. For testing at various temperature levels this advantage is even greater.
The twin axis X/Z high g module for the MT9928 gravity handler offers advantages in test time, test process optimization and flexibility, as well asbetter equipment utilization. The module has proven best performance with less than 1.5 % THD at 14 g 100 Hz stimulation.
Multitest is headquartered in Rosenheim, Germany, and is one of the world’s leading manufacturers of semiconductor material handling equipment and interfaces for the testing and calibration of semiconductors and sensors.
To find out more please visit www.multitest.com/sensor
