Silterra’s process puts the PMUT on top of CMOS resulting in a single-chip solution. The PMUT is formed using a CMOS compatible piezoelectric material and surface micro-machining techniques.
Engineers are free to build PMUT sensors on top of any of Silterra’s CMOS/BCD/RF process platforms at 180nm and 130nm. The design platform is supported by relevant CMOS IP and a physical design kit is available to enable a fully integrated system-on-Chip. The PDK supports a configurable PMUT cell to address different end market applications such as a 20MHz PMUT cell for finger-print sensing or a 5MHz PMUT cell for medical imaging.
The PMUT-on-CMOS platform is currently available for prototyping, Silterra said.
“As this process uses most of the standard CMOS process modules, we are confident to achieve manufacturability and defect density levels similar to the traditional CMOS technologies. By offering a truly monolithic solution, we managed to reduce the parasitics significantly and also offer high fill-factors,” quoted Arjun Kumar Kantimahanti, senior vice president of the MEMS and sensors business unit at SilTerra, in a statement.
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