Spellman unveils new series of electrostatic chuck high voltage power supplies
New Products
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By
eeNews Europe
The ESC Series features clean, accurate and easily controllable voltages required for semiconductor based electrostatic chuck wafer applications. The well regulated supplies precisely secure wafers during lengthy process cycles. Versions are available with a ground referenced reversible output, in addition to units featuring a true floating bipolar output with associated floating center tap point.
Comprehensive fault diagnostic circuitry monitors power supply functionality and communicates status data to the user interface. Spellman’s ESC Series power supplies are housed in compact, lightweight packages designed for OEM installations requiring minimal system footprint space.
Visit Spellman High Voltage Electronics at www.spellmanhv.com.
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