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Swiss 3D optical metrology sale

Swiss 3D optical metrology sale

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By Nick Flaherty



Park Systems in South Korea has bought Swiss optical measurement technology developer Lyncée Tec.

Lyncée Tec is a 2003 spinout of 2003 the Swiss Federal Institute of Technology in Lausanne (EPFL). It develops Digital Holographic Microscope (DHM) technology that acquires 3D information of a sample over the full field of view without scanning for an imaging speed 100x faster than conventional interferometry-based optical profiling. This is used in MEMS, chip packaging and materials research.

In 2022 Park Systems bought Accurion in Germany, the world’s leading manufacturer of Imaging Spectroscopic Ellipsometers (ISE), and will combine the two along with its atomic force microscopes (AFM) business.

Details of the deal were not disclosed.

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“This acquisition represents a pivotal step in our journey to become an equipment company with a comprehensive suite of solutions for semiconductor processes,” said Dr. Sang-il Park, Founder and CEO of Park Systems. “Park Systems will integrate Lyncée Tec’s DHM technology into our Atomic Force Microscope (AFM) platform and build a fully automated DHM system, targeting various semiconductor applications, especially advanced packaging.”

“We’re excited to become part of the Park Systems family,” said Yves Emery, Founder and CEO of Lyncée Tec. “With this move, the pioneers and leaders of AFM and DHM are joining forces to make DHM even more efficient and disruptive, redefining what is possible in nanoscale metrology.  We are confident DHM will gain the visibility it deserves and establish itself as the premium imaging solution for fast, robust 3D measurements.”

“Park Systems has a model experience of commercializing AFM from a laboratory instrument to a semiconductor nanometrology solution,” added Dr. Etienne Cuche, inventor of DHM® technology and Founder and CTO of Lyncée Tec.  “Significant gains are expected from Park Systems’ global coverage and operational capabilities.  Having created the world’s very first DHM in a laboratory 25 years ago, I humbly reflect on all the systems installed around the world and all the applications developed with our customers, to whom I am extremely grateful for having brought us to this moment.”

www.parksystems.com

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