Synopsys and Varian claimed that the TCAD Sentaurus models derived from their collaborative work will speed up process development of advanced CMOS and memory technologies and reduce process development cost and time-to-market.
As part of this collaboration, Synopsys said it will use experimental data from Varian’s cryogenic implant process to develop and calibrate models for its TCAD Sentaurus tools.
"Today semiconductor manufacturers face tremendous challenges in improving device performance, achieving high product yield, reducing process R&D costs and meeting time-to-market targets. Therefore, it is increasingly critical for simulation to support novel process techniques to reduce technology development time and cost," stated Dr Yuri Erokhin, senior director for strategic technologies at Varian.
Erokhin continued: "Cryogenic ion implant has been proven to significantly improve transistor performance and is a key enabler in the manufacture of advanced devices. This collaboration with Synopsys will enable our mutual customers to explore and optimize the cryogenic implant process with simulation, reducing time-to-market."
Back in 2005, Synopsys announced the addition of the Varian’s ion implantation process data to its Sentaurus Calibration Library.
By incorporating the Varian Semiconductor data, Synopsys then said it had increased the predictability and accuracy of TCAD process simulation for advanced ultra- shallow junction (USJ) CMOS technology, allowing semiconductor manufacturers to reduce the overall cost and time for product development.
The technical storage or access is strictly necessary for the legitimate purpose of enabling the use of a specific service explicitly requested by the subscriber or user, or for the sole purpose of carrying out the transmission of a communication over an electronic communications network.
The technical storage or access is necessary for the legitimate purpose of storing preferences that are not requested by the subscriber or user.
The technical storage or access that is used exclusively for statistical purposes.The technical storage or access that is used exclusively for anonymous statistical purposes. Without a subpoena, voluntary compliance on the part of your Internet Service Provider, or additional records from a third party, information stored or retrieved for this purpose alone cannot usually be used to identify you.
The technical storage or access is required to create user profiles to send advertising, or to track the user on a website or across several websites for similar marketing purposes.