TDK plans range of ROHS-compliant piezo actuators
TDK has shown prototypes of two piezo actuators made of RoHS-compatible lead zirconate titanate (PZT) with an internal copper electrode ahead of a series of devices.
The COM30S5 (B58004M4030A020) and COM45S5 (B58004M4040A020) piezo actuators are available as unhoused, passivated prototypes in limited quantities and are not intended for series production.
The dynamic range, high force-to-volume ratio and nanometre precision are achieved through its patented copper-based High Active Stack (HAS) technology. This provides more robustness to moisture and a longer lifetime in applications such as pumps for semiconductor manufacturing equipment.
The voltage range goes from -10 to +180 V, their nominal stroke is reached at +160 V, and the allowed surface temperature ranges from -40 to +160 °C. With 30 mm and 45 mm heights, and with a cross-section of 5.2 mm x 5.2 mm, these actuators reach strokes of 55 and 83 µm correspondingly, at 160 V and 730 N of preload.
TDK plans to release three more PZT piezo actuators in 2023 to cover a wider application range.
The COM10S5 (Z63000Z2910Z001Z78) with 10 mm height and 16 µm of stroke, COM27S3 (Z63000Z2910Z001Z77, leaded) with 27 mm height and 47 µm of stroke, and the COM30S7 (Z63000Z2910Z001Z70) with 30 mm of height and 7 mm x 7 mm of cross-section delivering 55 µm of stroke and 2600 N of blocking force.
The piezo actuators are aimed at nano-positioning applications such as valve control for liquids and gasses in process engineering. Semiconductor manufacturing equipment makers are already using piezo actuators from TDK.
|
Series/Type |
Ordering code |
Dimensions |
Stroke [µm] at +160 V |
Recommended pre-load |
Blocking force (typ.) |
|
COM30S5 |
B58004M4030A020 |
5.2 x 5.2 x 30 |
55 ±10% |
730 |
1400 |
|
COM45S5 |
B58004M4040A020 |
5.2 x 5.2 x 45 |
83 ±10% |
730 |
1400 |
|
COM10S5 |
Z63000Z2910Z001Z78 |
5.2 x 5.2 x 10 |
16 ±10% |
730 |
1400 |
|
COM27S3 |
Z63000Z2910Z001Z77 (leaded) |
3.4 x 3.4 x 27 |
47 ±10% |
320 |
600 |
|
COM30S7 |
Z63000Z2910Z001Z70 |
7.0 x 7.0 x 30 |
55 ±10% |
1320 |
260 |
|
|
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