Tower makes military MEMS for Physical Logic
Tower has also provided test silicon for Physical Logic’s MAXL-CL-3000 upcoming commercial inertial navigation grade closed-loop MEMS accelerometers.
Physical Logic AG was founded in 2004 and has been developing MEMS technology based on the use of SOI. Its implementation of a MEMS accelerometer for tactical and navigational applications is based on a fully differential capacitive sensing architecture and special physical geometry that the company claims offers an improvement in linearity over other MEMS accelerometers.
Physical Logic creates a highly symmetrical design of the electrodes and spring elements during the microfabrication processes on SOI wafers with an extra proof mass for manipulating acceleration sensitivity created in the handler layer of the wafer, below the buried oxide. The company states it has also developed an integrated wafer level capping using a deep reactive ion etching process.
Physical Logic developed its MEMS-based accelerometer using a unique open-loop in-plane-bulk micromachining technology to provide a best-in-class tactical-grade accelerometer with 40g dynamic range, 0.2 percent scale factor non-linearity and 4mg long term bias repeatability. The MAXL-OL-2000 includes an ASIC driver and offers solutions for various navigation and avionics applications.
"TowerJazz’s MEMS offering, combined with its advanced power management platform and superior engineering capabilities, enhances our success in penetrating markets requiring MEMS-based accelerometer applications," said Katja Beyer CEO of Physical Logic, in statement from Tower Semiconductor Ltd.
The MAXL-CL-3000 is a commercial inertial navigation grade closed-loop MEMS accelerometers that offers non-linearity of 0.1 percent over 30g dynamic range and long term bias repeatability of 0.35mg, Tower said.
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