Uk firm secures funds to roll out 300mm wafer tool
Infinitesima in Oxford, UK, has raised funds in a strategic deal to ramp production of its Metron3D 300 mm in-line wafer metrology system ahead of customer shipments later this year.
The size of the investment from Korean fund Wonik Investment Partners is undisclosed, but indicates that Korean companies such as Samsung Semiconductor are likely customers. The fund is a subsidiary of Wonik, which operates a broad range of businesses, including supplying semiconductor materials and equipment to several Samsung companies.
“We recognise the significant growth opportunity for Infinitesima, with its unique 3D metrology technology and experienced team that can address the increasingly challenging requirements for process control of next generation semiconductors,” said Dong Su Kim, President of Wonik Investment Partners.
The Metron3D metrology system enables in-line 3D process control in leading edge wafer fabs for next generation semiconductors. It uses the company’s Rapid Probe Microscope (RPM) technology together with modules from leading industry suppliers to enable maximum performance and reliability. The technology, spun out of the University of Bristol, combines atomic force microscopy (AFM) for 3D surface detection with high-speed laser interferometry.
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The system has been designed for high throughput, fully automated, in-line production process control to address the increasing need for high resolution 3D metrology in the latest semiconductor processes.
“We are excited that our unique high-speed probe technology, together with the growing industry need for in-line 3D metrology, has resulted in strong customer engagements,” said Professor Andrew Humphris, CTO and founder of Infinitesima.
Andrew Dixon, Infinitesima Chairman and founder of ARC InterCapital said “we are delighted to welcome Wonik Investment Partners as a co-investor and partner as we introduce the Metron3D at leading semiconductor manufacturers.”
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