World’s smallest flow sensor uses MEMS

World’s smallest flow sensor uses MEMS

Technology News |
By Nick Flaherty

Target applications for the flow sensor include active filter monitoring in vacuum cleaners, air-conditioning units and other consumer appliances; pipe blockage detection in industrial and domestic gas-detection products and systems; air pump monitoring and control in both consumer and industrial applications; and portable healthcare equipment such as smart inhalers and fitness monitoring masks.

Flusso makes its flowmeter using a CMOS MEMS silicon platform with the additional programmability and configurability that allows. The flowmeter is packaged and assembled using microelectronic techniques providing both performance and scalability of manufacturing to tens of millions of parts per month.

The sensor measures flow rate across a wide measurement range of 0.001 to over 500 standard litres per minute in a bypass configuration. It delivers a fully temperature-compensated signal.

Flusso provides firmware and software to configure and customise different FLS110 operating modes depending on the application requirements; design guides; and application engineering support to help shorten new product development timescales.

FLS110 is integrated into a 6-pin DFN package, is reflow solderable and shipped in tape and reel for automated product assembly.

Samples are available now and are being supplied within a product evaluation kit. Volume production of the sensor is due to start in 1H21.

Next: Founders with form

Flusso was founded in 2016 by Professor Florin Udrea (co-founder of CamSemi, Cambridge CMOS Sensors, Cambridge Microelectronics, and Cambridge GaN Devices), Professor Julian Gardner (co-founder of Cambridge CMOS Sensors and Sorex), Dr John Coull, and Dr Andrea De Luca, all sensor experts with extensive experience in the semiconductor industry.

They have been joined by Robert Swann, an experienced entrepreneur specialising in early-stage semiconductor companies, as chairman, and Cleopatra Cabuz, formerly vice president of technology and partnerships in Honeywell’s Safety and Productivity Solutions division.

The company raised $5.7 million in Series A funding back in June 2020. That round was set to enable the scale up production of what Flusso calls the world’s smallest flow sensor.

The round was led by Parkwalk Advisors and Foresight Williams Technology EIS Fund, with participation from 24 Haymarket, Cambridge Enterprise, Martlet, and Cambridge Angels.

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