BluGlass pushes to commercialize RPCVD

July 24, 2018 // By Peter Clarke
BluGlass pushes to commercialize RPCVD
BluGlass Ltd. (Silverwater, Australia), a developer of remote plasma chemical vapor deposition (RPCVD) semiconductor manufacturing technology, has raised approximately AUD$11.2 million (about US$8.3 million) for a push to commercialize its technology.

The technology has a history that dates back to the last century. The company was founded in June 2005 after more than 15 years of research at Sydney's Macquarie University and to raise funds floated on the Australian Stock Exchange in September 2006.

Since then progress has been slow but steady as the company has sought to establish the key advantage of RPCVD over the metal-organic chemical vapor deposition (MOCVD) used for making compound semiconducting thin films and micro/nano structures. In the case of nitride layers such as aluminium-nitride and gallium-nitriide RPCVD uses nitrogen gas from a remote source – rather than ammonia – and deposition then occurs at a significantly lower temperature and can preserve the integrity of previously deposited materials and structures. This has advantages for p-GaN grown on top of MOCVD-deposited multi-quantum wells in LEDs where it is claimed to provide for better defined layer structures and increased LED efficiency.

To date BluGlass has been mainly engaged in development work and partnerships. Its route to market is to provide a specialized reaction chamber that can be retrofitted to pre-existing MOCVD machines from such vendors as Aixtron and Veeco and then to license its manufacturing technology. The chambers support wafer sizes up to 300mm diameter.

"We do have some contract manufacturing using MOCVD and RPCVD machines, but our business model is about licensing the technology and providing the chamber," Giles Bourne, CEO of BluGlass, told eeNews Europe in an interview. The foundry work takes place under the EpiBlu brand name.

Giles Bourne, CEO of BluGlass Ltd.

BluGlass has been operating at a loss in recent quarters but Bourne is optimistic that after many years of development work the market is finally coming towards his company's technology. Bourne said the money raised recently is being used to add processing machines in its Australian pilot facilities but, more importantly, to enhance its sales and marketing footprint in the United States and Europe.

The biggest opportunity is in LED and specialized LED manufacture but with additional longer-term opportunities in the many additional areas where GaN may be deployed. These include microLEDs, RF and power semiconductors as well as compound semiconductor photovoltaics. "We are already doing work in power at Griffith University," said Bourne.

Bourne added that while novel applications of GaN are exciting possibilities for the future the priority has to be the market that is available now – mainstream discrete LED manufacture. "We have to commercialize this technology," he said.

Next: Partnerships in place

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