Micromachined inertial sensors have become an integral part of many consumer products, such as handheld mobile terminals, cameras, and game controllers.
In addition, micromachined inertial sensors are widely used in vibration monitoring in industry, automotive safety and stability control, and navigation. In general, micro-sensors can be piezoelectric, piezoresistive or capacitive. However, the high thermal stability and high sensitivity of capacitive sensing makes it more attractive for a wide range of applications.
Read the full article on page 38 of our March digital edition
