MEMS sensor signal conditioning for a thermal flow meter

March 22, 2013 //By Marko Hepp and Bernd Schrörs
MEMS sensor signal conditioning for a thermal flow meter
Sensors for the flowmetering of mass, volume, or velocity use very different physical principles of measurement in order to satisfy a whole range of different requirements.

One principle of flowmetering that is rapidly gaining acceptance is the thermal method, in which the transfer of heat in a liquid or gas is measured. In this procedure a heating element supplies a certain amount of heat and temperature sensors measure the heat distribution. This principle is well suited for miniaturization with MEMS sensors and for ASSP system integration. Low flow rates can also be precisely measured and controlled, as in medical applications, for example.

Read the full article on page 42 of our March digital edition


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