Multiproject graphene wafer runs aim at transistors: Page 2 of 2

February 10, 2021 // By Nick Flaherty
Multiproject graphene wafer runs aim at transistors
The €20m 2D Experimental Pilot Line (EPL) project is supporting volume production of graphene sensors and transistors on 200mm and 300mm wafers with several multiproject wafer runs

VTT Research in Finland and AMO in Germany will focus on graphene while imec will focus on transistor applications using graphene with transition metal dichalcogenides (TDMC) as 2D semiconductors.

“We have MPW in pillar one of the project starting in 2022,” said Sanna Arpiainen, research team leader at VTT Research in Finland. “The MPW by VTT, imec and AMO will have cost based pricing and a single point of contact and the goal is to transfer this to Europractice after 2024,” she said.

The first MPW run will be for bottom gated graphene sensors by October 2022 at AMO, with a bottom and liquid gated sensor MPW run by March 2023 at VTT. “Then there will be other runs every six months for electronics and sensors at AMO,” said  Arpiainen. There will also be small production runs for partners in the project.

This will culminate in a run at imec for TMDC transistors ready by September 2024.

www.graphene-flagship.eu/innovation/pilot-line/

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