Nanoscale MEMS Resonator Structure Yields Controllable MHz-Range Filter, Isolator

February 22, 2019 //By Bill Schweber
Nanoscale MEMS Resonator Structure Yields Controllable MHz-Range Filter, Isolator
By fabricating a nano-MEMS honeycomb lattice, researchers developed a solid-state device that can function as a voltage-tunable filter or unidirectional energy coupler for electrical energy in the 10 to 20-MHz range that’s been converted into acoustic-like phonons.

They fabricated and tested high-frequency “topological” insulators with six lattice sites in a unit cell. The nanoelectromechanical lattice (NEML) design has periodically etched holes of 500 nm diameter in an extended honeycomb lattice, and insulating Si-rich silicon-nitride (SiNx) membranes (average thickness of ~79 nm) that form a phononic crystal with periodic, curved boundaries (see figure 1).



1. Scanning electron microscope image of the nonlinear NEML: Simultaneously applying Vdc and Vac voltages to the excitation electrode via a bias tee electrostatically triggers flexural motions while VT is a tuning gate voltage applied to the tuning electrodes to activate on-site electrostatic potentials (scale bar is 10 μm). (Source: Caltech).


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