Etch machine sent to aid quantum MEMS research

Etch machine sent to aid quantum MEMS research

Technology News |
By Peter Clarke

Memsstar Ltd. (Livingston, Scotland) has shipped an oxide etch system for MEMS research to the Walther-Meißner-Institut for Low-Temperature Research (WMI) in Garching, Germany.

The Orbis Alpha Xeric surface micromachining tool will be used to research quantum MEMS systems on 200mm-diameter wafers.

WMI will use vapor-phase hydrogen fluoride etching for stiction-free release of MEMS and NEMS for quantum sensing. WMI also plans to use the Memsstar tool to fabricate superconducting quantum-bits (qubits).

“The truly leading-edge work being done at WMI requires our technology’s advanced control and capabilities to meet their varied application requirements,” said Tony McKie, CEO of Memsstar, in a statement.

Related links and articles:

News articles:

Memsstar upgrades MEMS etch and deposition

Quantum market has 13 percent CAGR as supply chain forms

Pasqal raises €100 million for neutral atom quantum computing

Will Europe make same mistakes in quantum computing that it made in semiconductors?


Linked Articles